TY  JOUR
TI  Physical aspects of the chemically active medium formation in chlorine plasma under pulse discharge energization
KW  plasma
KW  interaction
KW  process
KW  transients
KW  chlorine
KW  silicon
JO  From Chemistry Towards Technology Step-By-Step
AU  Sitanov, D.V.
PY  2023
IS  4
PB  Yaroslavl State Technical University